CAMECA tool talk—Atom probe tomography for atomic scale characterization

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Robert Ulfig, EIKOS product manager at CAMECA Instruments Inc, presented at an tool talk on Thursday, February 25, 2021.

Atom Probe Tomography (APT) is the highest special resolution analytical characterization technique with high efficiency single atom detection for quantitative atom scale 3D compositional analysis and elemental mapping of chemical heterogeneities. This talk covers APT operational theory, an introduction to sample prep and data reconstruction, and an overview of various applications. A commercial cryo-UHV solution for FIB-APT specimen transfer is also be presented, which expands the application space for APT to biological materials, hydrogen containing materials, and surfaces prone to rapid oxidation.

tool talks are designed to introduce the latest transformative technologies, tools, methods, and even new sciences. These technical talks are sponsored by individual tool suppliers and geared toward the entire MIT community. The talks are scheduled approximately once a month and are organized by
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